Abstract: the micro electrode array has wide used both in the micro-fabrication field and the life science field.
摘要：超高金属微细阵列电极在微细加工领域和生命科学领域有广泛应用。
All visual prostheses have the same function: converting outside optical signal to certain current pulses and stimulating the relevant parts by the micro-electrode array to generated phosphenes.
各种视觉假体刺激的部位不同，但是基本功能是相同的，都需要将外界的光信号转换为可用的电流脉冲，通过微电极阵列刺激相关部位产生光幻视。
The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed, and two process routes based on MEMS were developed for the skin fabrication.
设计了一种包含柔性基底层、金属电极图案层和微凹坑阵列层的三层式蒙皮结构，提出了两种基于MEMS工艺的制作方法。
The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed, and two process routes based on MEMS were developed for the skin fabrication.
设计了一种包含柔性基底层、金属电极图案层和微凹坑阵列层的三层式蒙皮结构，提出了两种基于MEMS工艺的制作方法。
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