A set of data processing system of EFPI optical fiber micro displacement sensor is designed.
设计了一套EFPI光纤微位移传感器数据处理系统。
A laser micro displacement measuring system for measuring dynamic micro displacement is introduced.
介绍了一种可进行动态微位移测量的激光微位移测量系统。
The micro displacement technology is one of essential technology of the precision machinery and high accuracy instrument.
微位移技术是精密机械和仪器实现高精度的关键技术之一。
Used the phase of laser interference fringes, a simple, fast and accurate micro displacement measuring method is proposed.
利用激光干涉条纹的位相，提出了一种简便、快速且精度很高的微小位移的测量方法。
A micro displacement mechanism featured with high accuracy, high audio response and long travel is introduced in this article.
介绍一种在高精度下兼有高频响和大行程特性的微位移装置。
In the case of micro displacement technology, the flexure hinge is an ideal mechanism to realize the micro displacement and high resolution.
在微位移技术中，柔性铰链是实现微位移和高分辨率的理想机构。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The principle, structure, design and calculating methods on micro displacement worktable with three degrees of freedom supported by elastic guides are presented.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
The friction drive mechanism moves well even when driven at high frequency and with long strokes, so it can be used with open-loop control systems for micro displacement.
进给速度可通过改变驱动脉冲的频率调节，机构在高频驱动大位移动作时亦表现出准确的步进特性，可用于小型机电系统的开环进给驱动。
Variable-gapcapacitance sensor has high sensitivity, specially applying to non-contact measurement of micro displacement, and slightly affecting the system to be measured.
变气隙式电容传感器具有灵敏度高、特别适用于微小位移的非接触测量，对被测系统影响小。
Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础，对精密驱动技术在精密定位工件台上的应用作了实验研究。
A high precision three-dimensional micro displacement test platform was set, and the measuring range, linearity and displacement error of the probe were tested and verified by experiments.
搭建了高精度三维微位移测试平台，对测头的测量范围、线性、位移误差进行了实验验证。
The system can be used in installing and debugging the disc and also in measuring the micro displacement of the object, the surface shape and thickness of the object, so it has fairly applied value.
本系统除可用于码盘的安装调试外，还可测量物体微位移、物体表面形貌及物体厚度，有很大的实用价值。
Then, PZT piezoelectric ceramics sensor's probe is contact with the center of diaphragm, if we use the uniform load model to calculate and analyze, it will cause error in micro displacement detection.
此时，压电陶瓷PZT的探针是抵在传感器膜片的中心点处，如果使用均布载荷模型进行计算和分析，将会产生较大的误差。
In this design and implementation of an inductive micro-displacement meter and digital indicator are presented.
本文介绍了一种电感式微位移测量仪和数字显示仪的设计与实现。
We also presented the design fundamentals for micro-displacement amplifier, and the necessity of reasonable design for micro-displacement amplifier has been illuminated by practical application.
提出了微位移放大机构设计的原则，通过实例说明了位移放大机构合理设计的必要性。
For improving accuracy of the micro-displacement detection in stiffness measurement, this paper presents an image micro-displacement detection method.
为提高刚度测量中位移检测的精度，提出一种图像式微位移检测方法。
CCD micro-displacement measuring system is an ultra high accuracy non-contact laser displacement device on the basis of trigonometry theory.
CCD激光微位移测量头是利用三角法原理设计的一种高精度非接触激光微位移传感器。
An optical micro-displacement measurement method based on elliptic spot and off-axis principle is proposed.
提出一种基于离轴法并采用椭圆光斑的光学微位移计量手段。
The operation principle of a liquid crystal micro-displacement sensor is based on the dynamic scattering effect in the negative dielectric anisotropic nematic liquid crystal.
液晶微位移传感器的工作原理是以负介电各向异性的向列相液晶材料的动态散射效应为基础的。
A design method of micro-displacement amplifier in a novel piezoelectric servo was proposed based on stiffness analysis of flexure hinges.
针对一种新型压电舵机的微位移放大机构，提出一种基于刚度分析的设计方法。
The application of a low-voltage micro-displacement driving circuit and its control method on an optoelectronic profilometer are discussed.
讨论了低压微位移驱动电路及控制方法在光电轮廓仪上的运用。
These excellent single crystals, possessing a large displacement output under low magnetic field, build a foundation for the fabrication of the high precision micro-displacement actuators.
单晶材料消除了晶界对畴壁移动的影响，具有很好的低场下的位移输出能力，这为微位移致动器的研制奠定了很好的基础。
In this paper the design and implementation of an inductive micro-displacement meter are presented.
介绍了一种电感式微位移测量仪的设计与实现。
Abstract: in order to accurately measure the pulse equivalent and return difference of stepping motor, a laser micro-displacement measurement system is proposed based on thin film interference.
摘要：为了精确测量步进电机的脉冲当量和回程差，提出了一种基于薄膜干涉原理的激光微位移测量系统。
The development and application of High stability giant magnetostrictive micro-displacement actuator has great significance.
因此，高稳定性的超磁致伸缩微位移执行器的研制和应用，具有十分重大的意义。
A new type of pneumatic micro-displacement actuator is introduced so as to the micro feed control for precision machine tools.
为便于精密机床的微进给控制，研究了一种新型的气压式微位移驱动器。
The precision, sensitivity and stability in this system have been improved compared with traditional measurement technique, the full automatic measurement of micro-displacement is realized.
与传统测量方法相比，其精度、灵敏度及稳定性能有较大提高，并实现了微位移的全自动测量。
This thesis researches on the double-axis flexure hinges which widely used in the space multi-DOF micro-displacement work stage, and presents the compliance equations for double-axis flexure hinges.
本文针对应用于空间多自由度微位移工作台的双轴柔性铰链机构进行研究，推导柔性铰链柔度计算公式。
On the basis of the aiming principle of the atomic force probe a-long with 2D micro-displacement system and the high precision capacitive sensors , the micro-dimension measurement system is developed.
本文基于原子力微探针瞄准原理并结合二维微位移系统和高精度电容传感器，研制了微尺寸测量系统。
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