How to measure the 3-D surface topography of the micro-specimens quickly and accurately has become a challenge in the field of modern micro-measurement.
如何快速准确检测微观轮廓形貌，已成为现代精密测试技术与仪器研究的重要课题，所研究的并行共焦探测方法是使微小轮廓的快速高精度检测成为可能。
How to measure the 3-D surface topography of the micro-specimens quickly and accurately has become a challenge in the field of modern micro-measurement.
如何快速准确检测微观轮廓形貌，已成为现代精密测试技术与仪器研究的重要课题，所研究的并行共焦探测方法是使微小轮廓的快速高精度检测成为可能。
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