With the IC scaling down to deep-sub micro generation, due to the degradation of performance, any conventional device structure is not applicable to IC.
集成电路器件的特征尺寸进入深亚微米时代后,由于微细化和性能方面的影响,一些传统的器件结构将不再适用。
With the IC scaling down to deep-sub micro generation, due to the degradation of performance, any conventional device structure is not applicable to IC.
集成电路器件的特征尺寸进入深亚微米时代后,由于微细化和性能方面的影响,一些传统的器件结构将不再适用。
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