To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
To improve the performance of MEMS micro tactile probe, the structure design and parameter optimization of probe are developed.
为了提高MEMS微接触式测头的性能，系统开展了测头的结构设计和参数优化。
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