Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列,并对实验结果进行了分析和讨论。
Using the KOH anisotropy enchant the vertical micro mirror array is fabricated. And also, the result of experiment is analyzed and discussed.
使用KOH各向异性腐蚀液制作了垂直微反射镜阵列,并对实验结果进行了分析和讨论。
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