Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
Electrical power source based on radionuclide Ni-63 for micro-electro-mechanical systems with operation time in excess of 50 years.
针对运营时间超过50年的微型电子机械系统的基于物理放射性核种Ni- 63的电源。
Giant magnetostrictive thin films are very promising for micro-electro-mechanical systems (MEMS) as they combine high energy output, high frequency and remote control operation.
超磁致伸缩材料以其高能量输出、高操作频率、远程非接触式控制等特点广泛应用于各种微机械系统中。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
These micro transducers can be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical systems (MEMS) that can perform real-time distributed control.
这些微器件与信号调节和处理电路集成后，组成了可执行分布式实时控制的微电子机械系统(MEMS)。
Micromachining technologies, the key technologies in research and production of micromachined devices and micro electro mechanical systems, are not easy to manage.
微机械技术是研究，生产微机械器件和微电子机械系统的关键技术，熟练掌握并不容易。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
Micro Systems Engineering includes Micro Electro-Mechanical Systems (MEMS) and related equipment design, manufacture and package.
微系统工程包括微机电系统(MEMS)及相关设备的设计、制造和封装。
The paper expatiated the principle of giant magnetostrictive motor from structure and properties, and the application status in micro electro mechanical systems (MEMS).
从结构和性能上阐述了超磁致伸缩微型马达的原理及其在微机电系统中的应用状况。
Micro electro mechanical systems (MEMS) are the micro mechatronics fabricated by microelectronic technology and micromachining.
微电子机械系统(MEMS)是结合微电子技术和微机械加工技术制造而成的微型机电一体化系统。
With the fast development and wide application of MEMS (micro Electro-Mechanical Systems), it shows a tendency to develop new micro-seismometers.
随着微机电技术的广泛应用，开发微型化的新型地震计成为发展趋势。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
Micro electro mechanical systems Multi-granularity macro-modeling Non-standard structure Model order reduction;
微机电系统； 多粒度宏建模；非标结构；模型降阶；
This paper presents a robust optimal model of Micro Electro Mechanical Systems (MEMS) gyroscope and its design procedure.
提出了基于灵敏度分析的微机械陀螺稳健优化模型，开发了相应的稳健设计流程。
This paper presents a robust optimal model of Micro Electro Mechanical Systems (MEMS) gyroscope and its design procedure.
提出了基于灵敏度分析的微机械陀螺稳健优化模型，开发了相应的稳健设计流程。
应用推荐