Based on the principle of micro displacement of piezoelectric ceramic, the research on the precise actuator technique is presented, which is used for precise positioning work piece stage.
以压电陶瓷微位移原理为基础,对精密驱动技术在精密定位工件台上的应用作了实验研究。
This thesis researches on the double-axis flexure hinges which widely used in the space multi-DOF micro-displacement work stage, and presents the compliance equations for double-axis flexure hinges.
本文针对应用于空间多自由度微位移工作台的双轴柔性铰链机构进行研究,推导柔性铰链柔度计算公式。
This thesis researches on the double-axis flexure hinges which widely used in the space multi-DOF micro-displacement work stage, and presents the compliance equations for double-axis flexure hinges.
本文针对应用于空间多自由度微位移工作台的双轴柔性铰链机构进行研究,推导柔性铰链柔度计算公式。
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