Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched. This system is based on feedforward and digital PID control.
结合检测装置和微机控制系统，设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。
Combining computer system and detecting device, the micro-positioning system of compound control is designed and researched. This system is based on feedforward and digital PID control.
结合检测装置和微机控制系统，设计并研制了基于前馈控制同数字PID反馈控制相结合的复合控制的微定位系统。
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