A capacitive micro-acoustic sensor with a polysilicon film as diaphragm was designed in this paper.
设计了一种以多晶硅薄膜作为振动膜片的电容式硅微声传感器。
Aim at the disadvantage of traditional sensor for structural health monitoring for long, a new type of micro capacitive sensor based on MEMS is developed.
针对传统的传感器无法进行长期健康监测的不足，研发出一套新型的基于MEMS的硅微电容式传感器。
Using this method, the behavior equation of a capacitive micro pressure sensor is represented, then its reusable parameterized schematic-drive model is established coded by HDL (MAST).
针对电容式微型压力传感器，专门考虑膜片的空间连续行为以及结构、静电力的耦合作用，建立了包含接口电路在内的系统模型，据此进行了动态行为仿真。
The specific structure capacitive force micro-sensor is introduced. The principle and survey circuit demonstrated are demonstrated and analyzed.
介绍了一种经特殊工艺处理的电容式压力微传感器，分析和论证了其结构设计、工作原理和测量电路。
The specific structure capacitive force micro-sensor is introduced. The principle and survey circuit demonstrated are demonstrated and analyzed.
介绍了一种经特殊工艺处理的电容式压力微传感器，分析和论证了其结构设计、工作原理和测量电路。
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