The effects of surface thermal oxidation on the minority carrier lifetime of Czochralski (CZ) silicon wafers are investigated by photoconductive decay (PCD) method.
用高频光电导衰减法(PCD)研究了热氧化钝化对直拉硅少子寿命的影响。
The effects of surface thermal oxidation on the minority carrier lifetime of Czochralski (CZ) silicon wafers are investigated by photoconductive decay (PCD) method.
用高频光电导衰减法(PCD)研究了热氧化钝化对直拉硅少子寿命的影响。
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