Some new MEMS optical switches are introduced in detail in this paper include structures, drives and scales.
近年来国际上出现的一些新型MEMS光开关，包括其结构、驱动方式、规模等。
Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches.
光开关是光通信网络的重要功能器件，MEMS光开关是最具发展前景的光开关之一。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
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