• Some new MEMS optical switches are introduced in detail in this paper include structures, drives and scales.

    近年来国际出现的一些新型MEMS开关包括其结构驱动方式规模等

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  • Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches.

    开关光通信网络重要功能器件MEMS光开关是具发展前景的光开关之一。

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  • Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.

    微电机系统MEMS开关是微电机系统技术传统光学技术相结合新型机械式光开关。

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  • Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.

    论文比较各种类型开关特点基础结合现有工艺条件,完成了一种使用常规体硅微机械加工工艺实现的光开关设计制作。

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  • Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.

    论文比较各种类型开关特点基础结合现有工艺条件,完成了一种使用常规体硅微机械加工工艺实现的光开关设计制作。

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