The basic concept of optical switch, MEMS and MEMS optical switch were introduced.
介绍了光开关、MEMS和MEMS光开关的基本概念。
Expansibility is a very important performance for the design of MEMS optical switch array.
在MEMS光开关阵列设计中，扩展性是一项非常重要的指标。
This thesis presents a study on the non-silicon based MEMS optical switch and variable optical attenuator.
本硕士论文对基于非硅基微加工技术的光开关及可调光衰减器的设计制作与分析进行了研究。
Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches.
光开关是光通信网络的重要功能器件，MEMS光开关是最具发展前景的光开关之一。
A new polyimide (PI) -cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated.
介绍了一种新型的聚酰亚胺(PI)悬臂梁式电磁驱动微机电系统(MEMS)光开关，并对其总体结构进行了设计与仿真分析。
The MEMS optical switch drive method was analyzed and the MEMS optical switch control system was researched according to electrostatic drive 2d MEMS optical switch.
分析了MEMS光开关的驱动方式，并针对静电驱动、二维mems光开关，研究了MEMS光开关控制系统。
A new kind of MEMS electromagnetic micro actuator was developed, which can drive mirrors enter or leave the optical path of the switch.
研制了一种摆动式微电磁驱动器，用其驱动反射镜切入和切出光路。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
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