By the research for MEMS and the MEMS acceleration sensor, This assignment will finish a series of MIMU system, which will be applied to the rocket and the missile guided system.
该课题希望通过对MEMS技术和MEMS惯性传感器的研究，研制和设计出一系列能够应用于火箭和导弹制导的MIMU系统。
In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented.
为了提高微机电系统中静电-结构耦合数值计算速度，提出了一种新的针对微结构小变形的静电-结构耦合高效率数值计算方法。
At last, the trends of MEMS and MEMSpackaging are prospected, and the integrated MEMS system packaging is discussed.
最后对MEMS和MEMS封装的走向进行了展望，并对全集成MEMS系统的封装进行了一些探讨。
The basic concept of optical switch, MEMS and MEMS optical switch were introduced.
介绍了光开关、MEMS和MEMS光开关的基本概念。
The main design method and the application in the AMB of MEMS are studied in detail. Finally, the main problems and the development trend of MEMS are indicated.
主要讨论了微机电系统主要的设计方法以及微机电系统技术在磁力轴承中的应用，最后指出了目前微机电系统技术所面临的主要问题及其发展趋势。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
In this paper, the introduction of the MEMS technology and some useful MEMS devices were widely discussed in the first chapter.
论文首先讨论了MEMS技术及几种常用的MEMS典型器件和本论文要用到的微机械加工技术。
This paper introduces application of MEMS Sensor in fuzes and analyzes the performance figures of various MEMS Sensors according to the operating requirements and conditions of fuze system.
介绍微机电传感器在引信中的应用，根据引信的使用条件和使用要求，对各种微机电传感器的性能指标进行了分析。
As one of the most important MEMS devices, RF MEMS switches have been applied in front-end circuits of some microwave systems, antenna and phase shift architectures.
射频MEMS开关是重要的射频MEMS器件，一些RF MEMS开关已经应用于部分微波系统的前端电路、数字电容器组和移相网络。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
Based on machine micro-vision dynamic testing system for MEMS, the technique of blur image synthesis is presented to exact and analyze in-plane motion characteristic of MEMS devices.
基于机器微视觉的MEMS动态测试系统，利用模糊图像合成技术对MEMS的平面微运动特性参数进行提取和分析。
From the research of the RF MEMS devices and module, we can assure that the RF MEMS system has an extremely promising future and will be in application rapidly.
从RFMEMS器件和模块的研究可知，RF - MEMS系统的性能和应用前景是不可估量的，RF - MEMS将会很快走入实际应用中。
According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed.
根据MEMS测试的要求，设计并实现了一种基于计算机视觉的MEMS测试系统。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
The paper mainly introduced a new MEMS sensor of oil exploration, characters of MEMS sensor structure, medium material and sealed form as well as already reached technical indexes.
本文主要介绍了一种新的石油勘探MEMS传感器的结构特点、介质材料以及封装方式，并详细地介绍了该产品的主要技术指标。
Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.
微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。
Introduces wafer bonding process, technical requirements, application choice and Interaction for MEMS, and showing MEMS fabrication technology and application prospects.
介绍了晶圆键合工艺、技术要求、应用选择以及对MEMS的作用；展示了MEMS制造技术和应用前景。
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
Significance and characteristic of MEMS, research and development of MEMS in China in the past thirteen years and interesting points have been summarized in this paper.
本文概括地介绍微机电系统学科的重大意义，十三年来中国MEMS研发的总体概况，以及关注的热点。
The research on mechanical properties of MEMS materials is one of MEMS fundamental theoretical research fields.
MEMS材料力学性能研究是MEMS的重要基础理论研究领域之一。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
Micro actuator, as the important MEMS component, has become the research focus in Micro-Electronic Mechanical Systems (MEMS) field.
微驱动器作为微机械电子系统的核心部件，一直是微型机械电子系统(MEMS)的研究热点。
The design and development of MEMS material database provide a lot of theoretical and applied value for the industrialization of MEMS products.
同时，MEMS材料数据库的设计与开发对于实现微机电系统产品的设计开发，实现产业化等具有重要的理论和应用价值。
Internal stresses in micromachined thin films have a great influence on the properties of MEMS devices. Measurement of stresses in the films is critical for process monitoring and MEMS design.
微机械薄膜应力对MEMS器件有较大的影响，因此应力测量对于工艺监控和MEMS器件设计是必须的。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
In order to quickly generate three-dimensional model of MEMS and to realize process step simulation, a voxel-based fast MEMS process simulation method is given.
为了快速生成MEMS模型和实现加工的过程模拟，给出一种基于体素的快速MEMS工艺模拟方法。
Different kinds of MEMS devices and systems were born in succession along with the development of MEMS technology quickly. One of them was MEMS gas sensor.
随着MEMS技术的飞速发展，各种MEMS器件和系统相继问世，MEMS气敏传感器是其中之一。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
Optical switches made with micro-electro-mechanical systems (MEMS) technology bear advantages of both MEMS and traditional optics.
微电机械系统（MEMS）光开关是微电机系统技术与传统光学技术相结合的新型机械式光开关。
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