MEMS material database is a necessary tool for MEMS design.
MEMS材料数据库已经成为MEMS设计领域中必不可少的设计工具。
Studying the test method for mechanical properties of MEMS materials is the key related to solve the MEMS design, manufacturing, quality control and appraisal.
研究微材料机械力学性能的测试方法是解决MEMS设计、制造、质量控制与评价的关键环节。
To enhance the effect of simulation on MEMS design, this paper introduces a collaborative design into MEMS design and proposes the collaborative simulation of MEMS.
为了充分发挥仿真在MEMS设计中的作用，把协同设计的思想引入MEMS仿真中，提出了协同仿真的设计方式。
Internal stresses in micromachined thin films have a great influence on the properties of MEMS devices. Measurement of stresses in the films is critical for process monitoring and MEMS design.
微机械薄膜应力对MEMS器件有较大的影响，因此应力测量对于工艺监控和MEMS器件设计是必须的。
Firstly, the concept of parts and part library are summarized; then, the overall structure and the critical technology of the environment of part library based method of MEMS design are introduced.
介绍了部件及部件库的概念和基于部件库的MEMS设计环境的总体结构及关键技术。
Firstly, the concept of parts and part library are summarized; then, the overall structure and the critical technology of the environment of part library based method of MEMS design are introduced.
介绍了部件及部件库的概念和基于部件库的MEMS设计环境的总体结构及关键技术。
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