And much of the buzz about micro devices has shifted to nanotechnology, an endeavor that makes MEMS researchers look like hard nosed pragmatists.
许多关于微型装置的热门远景，现在已转移到奈米科技，让MEMS的研究人员反而像是冷静的实用主义者。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
Fabricating the nanoporous silicon membrane with nanotechnology and Bio-MEMS technology, the thickness of membrane, pore size and distribution, geometry shape and porosity can precisely controlled.
采用纳米技术和生物微电子机械系统技术制备纳米多孔硅膜，可准确控制膜的厚度、几何形状、孔大小、孔分布和孔隙率。
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