Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.

相对于传统PID主从同步控制方法，同步偏差的移动平均差减小18.2%，移动标准差减小61.5%，可以保证光刻机的曝光效果。

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Compared with the conventional PID masterslave control method, the move mean difference is reduced by 18.2% and the move standard deviation is reduced by 61.5%, and the exposure effect can be ensured.

相对于传统PID主从同步控制方法，同步偏差的移动平均差减小18.2%，移动标准差减小61.5%，可以保证光刻机的曝光效果。

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