This article presents an introduction to Plasma enhanced, magnetron sputtered deposition Technology.
本文介绍了等离子增强磁控溅射沉积技术。
The thermal stress in magnetron sputtered al coating on uranium substrate was studied by thermal elastic plastic finite element method (FEM).
对铀表面磁控溅射沉积铝镀层的热应力进行了热弹塑性有限元分析。
The thermal stress in magnetron sputtered al coating on uranium substrate was studied by thermal elastic plastic finite element method (FEM).
对铀表面磁控溅射沉积铝镀层的热应力进行了热弹塑性有限元分析。
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