The invention discloses a multi-element high-temperature resistant anti-shock magnetron cathode which comprises tungsten, thorium, rhenium and potassium.
本发明公开了一种多元素耐高温抗震磁控管阴极，由钨、钍、铼、钾组成。
Magnetron has filamentary cathode with small time hearting the shielded cathodic site liquid and air cooling and also the filter built-in by radio.
该磁控管具有加热时间短的阴极，屏蔽阴极，液体和空气冷却，内建无线电滤波。
The study showed that the maxim secondary emission coefficient of rare earth molybdenum cathode materials was 2.45, which meet the requirement (>2.0) of magnetron to the cathode materials.
研究结果表明，稀土钼次级发射材料的阴极试样的最大次级发射系数达到2.45，满足了磁控管对阴极材料的次级发射系数2.0以上的应用要求。
Using beam emission models, the influence to the magnetron characteristics by the cathode current destiny can be obtained.
利用磁路电子注发射方式针对不同的阴极发射电流进行了动态模拟，得到了不同发射电流条件下磁控管的工作特性。
The invention relates to a method for operating a magnetron sputter cathode, in particular a tube cathode or several tube cathodes forming an array.
本发明涉及一种用于操作磁控管溅射阴极、特别是阴极管或形成 一个阵列的几个阴极管的方法。
The utility model relates to a semi-circular column magnetic control sputtering cathode, belonging to a sputtering source component of a magnetron sputtering device.
一种半圆柱磁控溅射阴极，属于磁控溅射装置中的溅射源部件。
An alternative current medium frequency pulsed magnetron sputtering cathode power supply was introduced.
本文介绍了一种中频交流脉冲式磁控溅射靶极电源。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
The plasma can be 4 generated by hot-cathode discharge or RF discharge of gas. In addition, the device has four metal plasma sources, two magnetron sputtering targets, cold and hot target supports.
真空室内的气体等离子体可由热灯丝或射频放电产生，4另外还配置了4个金属等离子体源、两套磁控溅射靶和冷却靶台。
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