We employ the magnetic sputtering method to deposit amorphous tungsten films and investigate their thermal annealing process.
对使用磁控溅射法沉积的钨薄膜进行了热退火研究。
The system include pulse cathodic arc ion deposition, direct current cathodic arc ion deposition, magnetic sputtering and electronic beam evaporation technologies.
该系统集脉冲阴极弧离子镀、直流阴极弧离子镀、磁控溅射和电子束蒸发等镀膜工艺以及气体和金属离子注入于一体。
Physical method, including thermal evaporation and magnetic sputtering, and chemical coating method are applied to prepare organic-inorganic composite chromotropic film.
用热蒸发和磁控溅射的物理镀膜方法和溶胶凝胶化学涂布的方法相结合制备了有机和无机复合纳米光学变色薄膜。
Physical method, including thermal evaporation and magnetic sputtering, and chemical coating method are applied to prepare organic-inorganic composite chromotropic film.
用热蒸发和磁控溅射的物理镀膜方法和溶胶凝胶化学涂布的方法相结合制备了有机和无机复合纳米光学变色薄膜。
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