The new actuator structure is mainly made of SU-8 and it can be bi-directionally driven by electromagnetic force from permanent magnet array.
作者不仅提出了以SU—8胶为主要材料制作执行器的结构,并且提出了通过永磁阵列实现电磁双向驱动。
The new actuator structure is mainly made of SU-8 and it can be bi-directionally driven by electromagnetic force from permanent magnet array.
作者不仅提出了以SU—8胶为主要材料制作执行器的结构,并且提出了通过永磁阵列实现电磁双向驱动。
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