Several technical problems in arc source design, including arc mode, arc polarity, ignition mechanism and arc confinement and macroparticle reduction were discussed.
讨论了真空电弧沉积中弧源设计的有关问题,如电弧运行模式、电弧极性、点火方式、电弧的约束方式以及宏观粒子抑制方式等。
Several technical problems in arc source design, including arc mode, arc polarity, ignition mechanism and arc confinement and macroparticle reduction were discussed.
讨论了真空电弧沉积中弧源设计的有关问题,如电弧运行模式、电弧极性、点火方式、电弧的约束方式以及宏观粒子抑制方式等。
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