The quality of top silicon layer formed by anneal at low temperature may be better than that at high temperature.

通过低温退火，可以获得质量优于高温退火的顶部硅层。

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The quality of top silicon layer formed by anneal at low temperature may be better than that at high temperature.

通过低温退火，可以获得质量优于高温退火的顶部硅层。

youdao