An implanter without ion mass analyzer was used to fabricate thin SOI materials by low energy and low dose water ions implantation instead of conventional SIMOX.
采用无质量分析器的离子注入机，以低能量低剂量注水的方式代替常规SIMOX注氧制备soi材料。
The comparison shows that the experessions obtained in the present paper can give good description to the range distributions of low energy ions in solids.
利用本文的结果可以较好描述低能轻离子在固体中的射程分布，同时又有很高的计算效率。
The main characteristic of the low energy ions mutation is its mass deposition effect.
低能离子束诱变的主要特点是其具有质量沉积效应。
It is observed that the energy losses decrease slowly with the increasing incident angles for low velocity ions, whereas swift ions lose more energy with the increase of the incident angles.
计算结果表明：低速重离子的能量损失随初始电荷态的升高而缓慢上升，却随入射角度的增加而缓慢下降，离子的电荷态和入射角度对离子的掠角散射轨迹和能量损失都有影响。
The biological effect of 2-keto-L-gulonic acid strains and their DNA implanted by low energy ions have been studied.
对低能离子注入2-酮基-L-古龙酸（2-KLG）生产菌的生物学效应和注入离子对DNA的损伤效应进行了初步研究。
The biological effect of 2-keto-L-gulonic acid strains and their DNA implanted by low energy ions have been studied.
对低能离子注入2-酮基-L-古龙酸（2-KLG）生产菌的生物学效应和注入离子对DNA的损伤效应进行了初步研究。
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