The position and length of cantilever stiction change with static driven voltage, so the voltage displacement characteristic depends on load history.

在静电力作用下，悬臂梁粘连的位置和长度会改变，使得执行器的电压位移特性严重依赖加载历史。

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The position and length of cantilever stiction change with static driven voltage, so the voltage displacement characteristic depends on load history.

在静电力作用下，悬臂梁粘连的位置和长度会改变，使得执行器的电压位移特性严重依赖加载历史。

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