The paper introduces emphatically the making step and method of X -ray lithograph etching in LIGA technology.

着重介绍了LIGA工艺中X射线光刻掩模的制作步骤和方法。

youdao

The paper introduces emphatically the making step and method of X -ray lithograph etching in LIGA technology.

着重介绍了LIGA工艺中X射线光刻掩模的制作步骤和方法。

youdao