The LiTaO3 thin film was chosen as infrared sensing film and prepared by a sol-gel process using lithium acetate and tantalum ethoxide as starting materials.
用醋酸锂和乙醇钽作为起始反应物，通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜，并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。
The LiTaO3 thin film was chosen as infrared sensing film and prepared by a sol-gel process using lithium acetate and tantalum ethoxide as starting materials.
用醋酸锂和乙醇钽作为起始反应物，通过溶胶凝胶工艺生成了对红外敏感的钽酸锂薄膜，并详细讨论了基于钽酸锂薄膜的红外探测器件制备工艺。
应用推荐