In order to enhance the reliability and repeatability of the ferroelectric thin film preparation, the liquid source MOCVD system is designed based on PLC.
为了提高制备铁电薄膜的可靠性和重复性，设计了基于PLC控制的液态源MOCVD系统。
In order to enhance the reliability and repeatability of the ferroelectric thin film preparation, the liquid source MOCVD system is designed based on PLC.
为了提高制备铁电薄膜的可靠性和重复性，设计了基于PLC控制的液态源MOCVD系统。
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