System structure and algorithm used in the measurement of 3D surface profile are presented while using the light bulb phase-shift interfering method.
提出了用白光相移干涉法进行三维表面轮廓测量应采用的系统结构和算法。
System structure and algorithm used in the measurement of 3D surface profile are presented while using the light bulb phase-shift interfering method.
提出了用白光相移干涉法进行三维表面轮廓测量应采用的系统结构和算法。
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