Based on the integral principle, by extending and splitting beam, a lenslet array homogenizer for excimer laser is designed.
根据理论和实验结果，利用积分原理，对准分子激光扩束和分束整形，设计了一套准分子激光均束系统。
Based on the integral principle, by extending and splitting beam, a lenslet array homogenizer for excimer laser is designed.
根据理论和实验结果，利用积分原理，对准分子激光扩束和分束整形，设计了一套准分子激光均束系统。
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