During the layerout cutting process for thee beam lithography system, some polygons with one or more inner holes may appear.
电子束曝光机版图切割过程中可能出现带内孔的多边形，并且多边形内环与外环之间可能发生重叠。
During the layerout cutting process for thee beam lithography system, some polygons with one or more inner holes may appear.
电子束曝光机版图切割过程中可能出现带内孔的多边形，并且多边形内环与外环之间可能发生重叠。
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