Three main factors, layer thickness fluctuation, interfacial roughness and interdiffusion of non-ideal soft X-ray optical multilayers were characterized quantitatively.
三个主要因素，非理想的软x射线光学多层膜的界面粗糙度和相互扩散层的厚度波动，定量的特点。
Three main factors, layer thickness fluctuation, interfacial roughness and interdiffusion of non-ideal soft X-ray optical multilayers were characterized quantitatively.
三个主要因素，非理想的软x射线光学多层膜的界面粗糙度和相互扩散层的厚度波动，定量的特点。
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