After etching the surface of GaAs chip could be smooth and the isolation grooves have little edges, which can completely meet the requirements of device design.
腐蚀后芯片表面平整度、侧蚀等指标初步达到器件设计的要求。
After etching the surface of GaAs chip could be smooth and the isolation grooves have little edges, which can completely meet the requirements of device design.
腐蚀后芯片表面平整度、侧蚀等指标初步达到器件设计的要求。
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