Preparation of thermal sensitive thin film resistor is one of key technologies in uncooled micro bolometer IR FPA fabrication.
热敏薄膜电阻制备是非致冷微测辐射热计红外焦平面的一项关键技术。
The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base.
此红外探测仪的核心器件焦平面阵列（FPA）由无硅基底结构的微悬臂梁阵列构成。
The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base.
此红外探测仪的核心器件焦平面阵列（FPA）由无硅基底结构的微悬臂梁阵列构成。
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