The electronic circuitry of the various vacuum protection schemes, which use sputtering ion pump or cold-cathode or hot cathode ionization gauge as sensors, was compared.
分析比较了溅射离子泵、冷阴极电离超高真空计、热阴极电离超高真空计等作为真空保护传感器的不同电子学设计。
A composite pump was developed which is composed of a non evaporable getter pump and a sputtering ion pump.
研制了一种由非蒸散型消气剂泵与冷阴极溅射离子泵组成的复合泵。
A composite pump was developed which is composed of a non evaporable getter pump and a sputtering ion pump.
研制了一种由非蒸散型消气剂泵与冷阴极溅射离子泵组成的复合泵。
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