The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
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