And the depth profile resolution of interface analysis is determined by compromise between the ion mixing and pile up effect.
深度剖面分析的分辨率由离子混合效应和原子堆积效应的折衷结果而决定。
Dynamic TCIS code may investigate complex problems concerning three-elemental targets bombarded by energetic ions, such as the ion implantation at large dose, preferential sputtering, ion mixing, etc.
动态tcis可以研究离子束轰击三元靶的复杂问题：如大剂量离子注入、择优溅射和界面混合等。
Dynamic TCIS code may investigate complex problems concerning three-elemental targets bombarded by energetic ions, such as the ion implantation at large dose, preferential sputtering, ion mixing, etc.
动态tcis可以研究离子束轰击三元靶的复杂问题：如大剂量离子注入、择优溅射和界面混合等。
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