The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
Oxygen ions from a cold cathode ion-gun have been used tor bombarding the growing thin films.
用一个冷阴极离子枪产生的氧离子轰击淀积过程中的薄膜表面。
The gun is composed of the liquid metal ion source of Ga, the tip microadjusters' assembly, the ion lens, and the electrostatic octopole deflector.
它由液态金属离子源,源尖微调装置,离子透镜及静电八极偏转器等组成。
The gun is composed of the liquid metal ion source of Ga, the tip microadjusters' assembly, the ion lens, and the electrostatic octopole deflector.
它由液态金属离子源,源尖微调装置,离子透镜及静电八极偏转器等组成。
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