A beam-line vacuum interlock protecting system consists of fast-closing valve, gate valves, sensors and control system.
光束线真空联锁保护系统主要由快阀、门阀、压力传感器(真空规)和控制系统等组成。
A beam-line vacuum interlock protecting system consists of fast-closing valve, gate valves, sensors and control system.
光束线真空联锁保护系统主要由快阀、门阀、压力传感器(真空规)和控制系统等组成。
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