A fiber Fizeau interferometer for measurement of micro-vibration of MEMS devices is presented, which is simple in configuration and easy to operate.
提出一种结构简单、使用方便的用于微电子机械部件运动状态测量的光纤斐索干涉装置。
Because the measurement standard of grating system is grating pitch, compared to usual interferometer, diffractive grating, system reduces environment influence on measurement accuracy.
由于光栅干涉测量系统以光栅栅距作为测量基准，相对于传统干涉仪，光栅尺系统受环境因素造成的测量误差影响较小。
Most of traditional methods of angular measurement based on a Michelson Interferometer or its modifications have the same principle: the rotation is transformed into an optical path difference (OPD).
传统激光干涉测角方法，大多采用迈克尔逊干涉仪光路或其变形，将角度测量转变为光程测量。
Dual-frequency laser interferometer is a widely used precision measurement instrument.
双频激光干涉仪是应用广泛的精密测量仪器。
This paper introduces the laser interferometer for measurement of displacement and vibration for industrial robot.
本文介绍的是用于工业机器人检验的激光干涉测量法。
A novel wavelength scanning fiber optic interferometer for absolute distance measurement has been proposed.
提出了一种可用于绝对距离测量的光纤扫描干涉仪。
An optically recording velocity interferometer system (ORVIS) is constructed. It is applied to laser-driven shock experiments as a method for equation of state (EOS) measurement.
研究建立一种光学记录速度干涉仪系统(OR VIS)，用于激光产生冲击波研究物质状态方程实验中的参数测量。
A new laser interferometer method is presented and used to quick measurement of parallelism of optical flat.
文章提出了一种新的检测方法即用数字波面干涉仪检测平晶的平行度。
A modulated laser interferometer used for piezoelectric characteristic measurement of the piezoelectric ceramic is discussed.
介绍可测量压电陶瓷压电特性的激光干涉调制测量方法。
Displacement measurement error and its character of self mixing interferometer are analyzed. The design ruler of self mixing interferometer is presented.
分析了激光自混合干涉仪位移测量误差及特点，提出了干涉仪的设计原则。
A wavelength scanning fiber optic interferometer for absolute distance measurement has been proposed.
建立了用于绝对距离测量的波长扫描光纤干涉仪实验系统。
We applied this method to the stiffness measurement of flexible parts, and located the displacement with the help of laser interferometer.
此微位移检测方法已用于弹性元件刚度测量仪中，并采用激光干涉仪进行标定。
A new laser diode interferometer for micro vibration measurement is proposed. The interferometer can measure micro vibrations of an object in real time.
设计了一种半导体激光干涉测量仪，可以实时测量物体的微小振动。
The dynamic measurement characteristics of a novel wavelength scanning interferometer for absolute distance measurement are analyzed in terms of theory.
对用于距离绝对测量的波长扫描干涉法的动态测量特性进行了分析。
Based on the optical heterodyne interferometer and transmission ellipsometry, a new fast measurement technique of nanometer film was presented computational.
结合激光外差干涉法和透射式椭偏测量原理，研究了一种快速、高精度测量纳米厚度薄膜光学参数的方法。
According to the characteristics of Michelson interferometer, a interferometer with unequal arms is designed for the measurement of tiny deformation.
根据迈克尔逊干涉仪的特点，设计了用于测量微小形变的不等臂迈克尔逊干涉仪。
Nonlinear errors caused by mis-installation of common-path heterodyne interferometer affected the measurement precision of the system.
共光路外差干涉仪具有很高的分辨率，但因为安装、调试误差会产生非线性误差，影响系统的测量精度。
Research on Angle measurement accuracy of short-baseline interferometer system.
短基线干涉仪系统角度测量精度的研究。
A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection Angle measurement.
为了实现较大的偏转角度测量，该平行平板干涉仪引入了一位置探测系统。
An improved method of Angle measurement is proposed based on a parallel plate interferometer.
提出一种基于平行平板干涉仪的改进型角度测量方法。
A novel wavelength scanning fiber-optic interferometer for absolute distance measurement has been proposed.
提出了一种可用于绝对距离测量的波长扫描光纤干涉仪。
A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed.
提出一种实时测量表面形貌的正弦相位调制半导体激光干涉仪。
The measurement stability and repetitiveness of the laser interferometer is improved by means of convenient mode inhibiting technique.
利用共模抑制技术，提高了干涉系统的测量稳定性和重复性。
Thereby solve the problem of automatic reading in Ubbelohde interferometer and improved its measurement precision and accuracy.
从而解决了乌氏干涉仪自动读数的问题，提高了乌氏干涉仪的测量精度和准确性。
Experiment show that using the delayed fiber ring interferometer in measurement system can obtain maximum measurement sensitivity.
实验证明，系统使用光纤环行延时干涉计可以得到最大的测量灵敏度。
During the optical interference testing, the measurement accuracy of the tested surface is influenced by the system structure of interferometer, which will decrease the reliability of the measurement.
在干涉检验过程中，被检元件的面形误差检测精度受到干涉仪系统结构的影响，从而降低测量结果的可靠性。
During the optical interference testing, the measurement accuracy of the tested surface is influenced by the system structure of interferometer, which will decrease the reliability of the measurement.
在干涉检验过程中，被检元件的面形误差检测精度受到干涉仪系统结构的影响，从而降低测量结果的可靠性。
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