A polarization coding method representing the bipolar interconnection by using a single bipolarized mask is proposed.
本文提出一种用一块单极性掩模板表示双极性互连矩阵的偏振编码方法。
The short channel effects , the structure of LDD and SOI, phaseshift mask and multilevel interconnection were included.
LDD和SOI结构； 移相掩模光刻技术和多层金属布线工艺。
The short channel effects , the structure of LDD and SOI, phaseshift mask and multilevel interconnection were included.
LDD和SOI结构； 移相掩模光刻技术和多层金属布线工艺。
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