To improve the precision and efficiency of the integrated circuit (IC) package, a 2-dof high speed and high precision XY positioning table driven by voice coil actuator is presented.
针对一类音圈电机直接驱动的二自由度高速精密定位平台，为了在高速高加速情况下，获得良好的动态特性，对其动力学控制方法进行研究。
To improve the precision and efficiency of the integrated circuit (IC) package, a 2-dof high speed and high precision XY positioning table driven by voice coil actuator is presented.
针对一类音圈电机直接驱动的二自由度高速精密定位平台，为了在高速高加速情况下，获得良好的动态特性，对其动力学控制方法进行研究。
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