From plasma wave equations and plasma kinetic equation, we analytically discussed the characteristic of current in an inductive coupled RF plasma and their damping mechanism.
从等离子体波动方程和动力学方程出发，利用解析方法，讨论电感耦合rf放电等离子体的电流特性和衰减机制。
From plasma wave equations and plasma kinetic equation, we analytically discussed the characteristic of current in an inductive coupled RF plasma and their damping mechanism.
从等离子体波动方程和动力学方程出发，利用解析方法，讨论电感耦合rf放电等离子体的电流特性和衰减机制。
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