By some experimental researches on IBSD system and regression analyzing, the exponent of cosine distribution is determined and the emluator are completed for quantificationally simulation.
通过在离子束溅射镀膜系统上的实验研究并用仿真模型进行回归分析，给出了准确的余弦分布函数指数，最终建立能够定量计算的仿真模型。
By some experimental researches on IBSD system and regression analyzing, the exponent of cosine distribution is determined and the emluator are completed for quantificationally simulation.
通过在离子束溅射镀膜系统上的实验研究并用仿真模型进行回归分析，给出了准确的余弦分布函数指数，最终建立能够定量计算的仿真模型。
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