The cleaning of hydrogen and nitrogen ECR plasma on sapphire substrates are carried out in the calibrated temperature system and evaluated by analyzing RHEED image in ECR-PEMOCVD system.
最后讨论了在经过校温的系统上进行蓝宝石衬底的氢氮等离子体清洗实验，并通过RHEED图像评价清洗结果质量。
A better result is got when cleaning sapphire by the plasma of hydrogen mixed with nitrogen.
实验中采用了氢氮混合等离子体清洗的方法，提高了清洗的质量。
A better result is got when cleaning sapphire by the plasma of hydrogen mixed with nitrogen.
实验中采用了氢氮混合等离子体清洗的方法，提高了清洗的质量。
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