In view of the sample which have scanning blind area such as a deep hole, alignment method is presented based on the characteristics of data.
针对存在光学扫描盲区(如深孔)的样件,提出了基于特征的数据对齐方法。
In view of the sample which have scanning blind area such as a deep hole, alignment method is presented based on the characteristics of data.
针对存在光学扫描盲区(如深孔)的样件,提出了基于特征的数据对齐方法。
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