In order to achieve high resolution in grating angles measuring system, phase fine division is adopted generally.
为了使光栅测角系统获得较高的分辨率，通常采用鉴相式电子细分。
And line grating is used to measure arc length in order to increase Angle measuring precision, thus high differentiate locating in space can be realized.
用长光栅测弧长来实现角度测量的高分辨率要求，实现空间上的高精度定位。
Weak modulated dielectric grating can be equivalent to planar waveguide. When it diffracted high-order spatial sub-wave is coupled with waveguide mode, a guided mode resonance is formed.
弱调制介质光栅可等效为平板波导，经其衍射的高级次子波与波导模式耦合时，形成导模共振。
Weak modulated dielectric grating can be equivalent to planar waveguide. When it diffracted high-order spatial sub-wave is coupled with waveguide mode, a guided mode resonance is formed.
弱调制介质光栅可等效为平板波导，经其衍射的高级次子波与波导模式耦合时，形成导模共振。
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