This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
This paper presents the construction method and characteristic error calculation of the elastic leaf spring guide in a micro displacement worktable.
介绍了一种以弹性导轨为支承的平面三自由度微动工作台的原理、结构、设计计算方法及闭环控制的基本原理。
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