To research the power consumption of gas sensors, often the front-side of the sensor array has fabricated, the back-side of the sensor is etched to form an air gap between substrate and housing.
为了研制低功耗气体传感器，在传感器阵列上表面制备完成后，从下表面腐蚀传感器芯片的基底，以造成传感器芯片和封装室之间形成一个空气夹层。
The artificial olfactory system based on gas sensitive sensors array and patterns recognition technology is an important method to recognize gases use the cross sensitivity of gas sensitive sensor.
基于气敏传感器阵列与模式识别技术的人工嗅觉系统是利用气敏传感器交叉敏感性进行气体识别的重要途径。
The artificial olfactory system based on gas sensitive sensors array and patterns recognition technology is an important method to recognize gases use the cross sensitivity of gas sensitive sensor.
基于气敏传感器阵列与模式识别技术的人工嗅觉系统是利用气敏传感器交叉敏感性进行气体识别的重要途径。
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