The effects of composition and pressure of its precursor on the properties, such as gas permeability, porosity, and electric resistivity, were studied.
研究了配料组成和前驱体成型压力对多孔碳板的气体透过性能、孔隙率、和电导率等指标影响。
This invention provides gas injector apparatus that extends into a growth chamber in order to provide more accurate delivery of thermalized precursor gases.
本发明提供了延伸到生长室中以提供热化前体气体的更准确输送的气体注射器装置。
The experiment results indicate that the moisture-resistance capability of SiC x film was mostly influenced by RF frequency and precursor gas flow ratio. It was also found that t…
实验发现，射频频率的变化对碳化硅薄膜的防水汽扩散能力影响最大，气体流量比次之，而功率和气体压力的变化影响较小。
The experiment results indicate that the moisture-resistance capability of SiC x film was mostly influenced by RF frequency and precursor gas flow ratio. It was also found that t…
实验发现，射频频率的变化对碳化硅薄膜的防水汽扩散能力影响最大，气体流量比次之，而功率和气体压力的变化影响较小。
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